Printhead integrated circuit having glass nozzle chambers

摘要

A printhead integrated circuit includes a silicon substrate; a CMOS layer having drive and control circuitry; a passivation layer covering the CMOS layer; and nozzle assemblies disposed on the passivation layer. Each nozzle assembly includes a nozzle chamber having a nozzle opening and a droplet ejection actuator associated with each of the chambers. The droplet ejection actuator is electrically connected to the drive circuitry and adapted to eject a droplet of the ejectable liquid from the nozzle opening. Each chamber comprises a roof and sidewalls extending from the passivation layer to the roof. The roof and sidewalls are both comprised of a glass material.