发明名称 METHOD OF PRODUCING PARTICLES BY PHYSICAL VAPOR DEPOSITION IN AN IONIC LIQUID
摘要 <p>A method is provided for producing particles, such as nanoparticles. The method includes introducing an ionic liquid into a deposition chamber, and directing one or more material toward or depositing one or more materials onto the ionic liquid by physical vapor deposition to form nanoparticles in the ionic liquid.</p>
申请公布号 KR101037615(B1) 申请公布日期 2011.05.30
申请号 KR20087020008 申请日期 2007.01.17
申请人 发明人
分类号 C23C14/22;B82Y40/00 主分类号 C23C14/22
代理机构 代理人
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