发明名称 APPARATUS AND METHOD FOR INSPECTING ORIFICE
摘要 PURPOSE: A device and method for inspecting an orifice are provided to enable a user to easily inspect the deformation of the orifice by discharging gas from the inlet of a nozzle through the orifice. CONSTITUTION: A base(111) includes a hole which supplies gas to an orifice. A ring-shaped protrusion unit(113) is upwardly protruded from the upper side of the base. A gas supply member(121) supplies gas to the hole. A sealing member(131) seals a space between an object and the base. A jig(140) applies fixed weight to the object.
申请公布号 KR101037635(B1) 申请公布日期 2011.05.30
申请号 KR20100010852 申请日期 2010.02.05
申请人 SEMES CO., LTD. 发明人 CHANG, LOUNG SUE;KANG, HEE YOUNG
分类号 H01L21/66;H01L21/205;H01L21/3065 主分类号 H01L21/66
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