发明名称 |
APPARATUS AND METHOD FOR INSPECTING ORIFICE |
摘要 |
PURPOSE: A device and method for inspecting an orifice are provided to enable a user to easily inspect the deformation of the orifice by discharging gas from the inlet of a nozzle through the orifice. CONSTITUTION: A base(111) includes a hole which supplies gas to an orifice. A ring-shaped protrusion unit(113) is upwardly protruded from the upper side of the base. A gas supply member(121) supplies gas to the hole. A sealing member(131) seals a space between an object and the base. A jig(140) applies fixed weight to the object.
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申请公布号 |
KR101037635(B1) |
申请公布日期 |
2011.05.30 |
申请号 |
KR20100010852 |
申请日期 |
2010.02.05 |
申请人 |
SEMES CO., LTD. |
发明人 |
CHANG, LOUNG SUE;KANG, HEE YOUNG |
分类号 |
H01L21/66;H01L21/205;H01L21/3065 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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