| 摘要 |
PURPOSE: A window opening and closing structure of a bath for processing a substrate is provided to reduce maintenance and repair time by easily opening and closing a window without an additional tool. CONSTITUTION: A window(200) opens and closes an opening(110) formed on one side of a bath body(100). A first coupling member(120) comprised of a protrusion part and a bended part is located on the upper and lower sides of the opening unit. A second coupling member(210) comprised of a protrusion part and a bended part is horizontally located on the upper and lower sides of the window. A first air tightness maintaining plate(130) is vertically formed on both sides of the opening unit. A second air tightness maintaining plate(220) is vertically formed on both sides of the window.
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