发明名称 PIEZOELECTRIC ACTUATOR, OPTICAL REFLECTION ELEMENT USING THE SAME AND PIEZOELECTRIC DRIVER
摘要 A first oscillating portion is provided with a first piezoelectric element having a first drive electrode. A second oscillating portion has a central axis different from that of the first oscillating portion and is provided with a second piezoelectric element having a second drive electrode. The first drive electrode and the second drive electrode are connected together.
申请公布号 US2011122471(A1) 申请公布日期 2011.05.26
申请号 US20080673238 申请日期 2008.08.20
申请人 PANASONIC CORPORATION 发明人 TERADA JIROU;NAKAZONO SHINSUKE;FURUKAWA SHIGEO
分类号 G02B26/08;H01L41/04;H01L41/09 主分类号 G02B26/08
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