发明名称 |
PIEZOELECTRIC ACTUATOR, OPTICAL REFLECTION ELEMENT USING THE SAME AND PIEZOELECTRIC DRIVER |
摘要 |
A first oscillating portion is provided with a first piezoelectric element having a first drive electrode. A second oscillating portion has a central axis different from that of the first oscillating portion and is provided with a second piezoelectric element having a second drive electrode. The first drive electrode and the second drive electrode are connected together.
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申请公布号 |
US2011122471(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
US20080673238 |
申请日期 |
2008.08.20 |
申请人 |
PANASONIC CORPORATION |
发明人 |
TERADA JIROU;NAKAZONO SHINSUKE;FURUKAWA SHIGEO |
分类号 |
G02B26/08;H01L41/04;H01L41/09 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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