发明名称 |
THIN FILM TRANSISTOR ARRAY PANEL AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
A manufacturing method of a thin film transistor (TFT) includes forming a gate electrode including a metal that can be combined with silicon to form silicide on a substrate and forming a gate insulation layer by supplying a gas which includes silicon to the gate electrode at a temperature below about 280° C. The method further includes forming a semiconductor on the gate insulation layer, forming a data line and a drain electrode on the semiconductor and forming a pixel electrode connected to the drain electrode.
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申请公布号 |
US2011124163(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
US201113020467 |
申请日期 |
2011.02.03 |
申请人 |
KIM BYOUNG-JUNE;CHOI JAE-HO;JEONG CHANG-OH;YANG SUNG-HOON;LEE JE-HUN;KIM DO-HYUN;OH HWA-YEUL;CHOI YONG-MO |
发明人 |
KIM BYOUNG-JUNE;CHOI JAE-HO;JEONG CHANG-OH;YANG SUNG-HOON;LEE JE-HUN;KIM DO-HYUN;OH HWA-YEUL;CHOI YONG-MO |
分类号 |
H01L21/336;H01L21/84 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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地址 |
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