(SPUTTERING TARGET)-(BUCKING PLATE) JOINT BODY, AND PROCESS FOR PRODUCTION THEREOF

摘要

Disclosed is a (target)-(bucking plate) joint body produced by joining a target material comprising Mg to a bucking plate comprising a Cu-Cr alloy, which is characterized in that the target material and the bucking plate are joined to each other through a layer comprising Ni and arranged at the interface between the target material and the bucking plate. The (sputtering target)-(bucking plate) joint body is applicable when magnesium (Mg) is used as the sputtering target material. Particularly, the joint body enables the improvement in the joint strength between the sputtering target and the backing plate for the purpose of improving the sputtering efficiency, and also enables the overcoming of disadvantages associated with magnesium (Mg) and disadvantages involved in the selection of a bucking plate compatible with magnesium (Mg).