| 摘要 |
<P>PROBLEM TO BE SOLVED: To adjust a light intensity without subtantially rotating a light intensity distribution of illuminating light on a predetermined surface. <P>SOLUTION: An illuminating device 12 for illuminating a pattern surface of a reticle R includes a diffractive-optical element 5A forming the light intensity distribution of the illuminating light on the predetermined surface, a rotatable turret plate 31, a rotary frame 33A rotatably fixing the diffractive-optical element 5A to the turret plate 31 at the position traversing the light path of the illuminating light by the rotation of the turret plate 31, and a translational unit 6A rotating the rotary frame 33A in response to a rotational angle of the turret plate 31 when at least a part of the diffractive-optical element 5A is in the light path of the illuminating light to cause the translational movement of the diffractive-optical element 5A in the direction traversing the light path of the illuminating light. <P>COPYRIGHT: (C)2011,JPO&INPIT |
