METHOD OF FABRICATING GRAPHENE USING CATALYST ALLOY

摘要

PROBLEM TO BE SOLVED: To provide a method of fabricating graphene using a catalyst alloy.

SOLUTION: The method of fabricating graphene using a catalyst alloy may include a step of forming an alloy catalyst layer including Ni on a substrate and a step of forming a graphene layer by supplying hydrocarbon gas onto the alloy catalyst layer. The alloy catalyst layer may include Ni and at least one metal selected from Cu, Pt, Fe and Au. When the graphene is fabricated, a catalyst metal that reduces solubility of carbon in Ni may be used together with Ni in the catalyst layer. An amount of carbon that is dissolved in the catalyst alloy layer may be adjusted and a uniform graphene monolayer may be formed.

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