| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cleaning method capable of efficiently cleaning attachments adhered to an object to be cleaned, and also to provide a device used for the same, and further to provide a cleaning medium. <P>SOLUTION: The flaky cleaning medium with flexibility having polishing abrasive grains at least on one surface is moved in the direction of the object to be cleaned and is made to contact with the material to be cleaned, and the attachments adhered to the object to be cleaned by sliding movement caused when the surface having the abrasive grains contact with the object to be cleaned are made to be removed. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
