MANUFACTURING METHOD FOR THIN FILM TYPE ABSORBER LAYER, MANUFACTURING METHOD FOR THIN FILM SOLAR CELL USING THEREOF AND THIN FILM SOLAR CELL

摘要

PURPOSE: A method for manufacturing a thin film type absorbing layer, a method for manufacturing a thin film solar battery using the same, and a thin film solar battery are provided to form a light absorbing layer by a heat evaporation deposition method, thereby forming a CIGS(Cu-In-Ga-Se) thin film type light absorbing layer with high quality. CONSTITUTION: An evaporation source of a chamber is charged by CIGS crystalline powder(S10). The CIGS crystalline powder has the diameter of 10 nano meters ~ 2 micro meters. The CIGS crystalline powder is simultaneously evaporated(S20). The evaporated CIGS crystalline powder is evaporate on the substrate to form a thin CIGS film(S30). A selenization process is performed to enhance the features of the thin CIGS film(S40).