HYBRID INTEGRATED OPTICAL MODULE

摘要

PROBLEM TO BE SOLVED: To provide a hybrid integrated optical module having high coupling efficiency by suppressing a connection loss between waveguides.

SOLUTION: The hybrid integrated optical module 1 is an optical module obtained by integrating a semiconductor chip 2 and a PLC chip 3. The semiconductor chip 2 includes a semiconductor waveguide 4 and is mounted on a Si bench 5. The PLC chip 3 includes a PLC substrate 6 and an optical waveguide 7 formed on the PLC substrate 6. An end face 2a of the semiconductor chip 2 is made to protrude from an end face 5a of the Si bench 5 to the PLC chip 3 side by a protrusion amount X. Gap adjustment (adjustment of a distance D) between the semiconductor waveguide 4 and the optical waveguide 7 becomes possible, on the basis of the position where the end face 2a of the semiconductor chip 2 is brought into contact with an end face 3a of the PLC chip 3 as a reference position (zero point).

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