发明名称 FLUID BED REACTOR
摘要 Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.
申请公布号 WO2011063007(A2) 申请公布日期 2011.05.26
申请号 WO2010US57058 申请日期 2010.11.17
申请人 REC SILICON INC;OSBORNE, E., WAYNE;SPANGLER, MICHAEL, V.;ALLEN, LEVI, C.;GEERTSEN, ROBERT, J.;EGE, PAUL, E.;STUPIN, WALTER, J.;ZEININGER, GERALD 发明人 OSBORNE, E., WAYNE;SPANGLER, MICHAEL, V.;ALLEN, LEVI, C.;GEERTSEN, ROBERT, J.;EGE, PAUL, E.;STUPIN, WALTER, J.;ZEININGER, GERALD
分类号 C23C16/442;C23C16/44 主分类号 C23C16/442
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