发明名称 CONVEYING DEVICE AND VACUUM APPARATUS
摘要 <p>Provided are technologies wherein an article to be conveyed is reliably held and is conveyed at high speed not only in an environment where the temperature of the article to be conveyed and the ambient atmospheric temperature are relatively low but also in an environment where such temperatures are high, and wherein dust generated during conveyance of the article to be conveyed is reduced as far as possible. A conveying device (50) is provided with an extensible and retractable link mechanism (20) comprising a plurality of arms to which power is transmitted from a drive source, and a mounting section (5) which is connected to the operation tip section of the link mechanism (20) via a third left arm (3L) and a third right arm (3R), and serves to mount a board (10). A downstream area of the mounting section (5) in the direction in which the board (10) is conveyed, is provided with a downstream force applying device (7) which, in conjunction with the operation of the link mechanism (20), abuts the side section of the board (10), thereby applying force to the board (10) in the direction toward the link mechanism (20). An upstream area of the mounting section (5) in the direction in which the board (10) is conveyed, is provided with an upstream force applying device (9) which, in conjunction with the operation of the link mechanism (20), abuts the side section of the board (10), thereby applying force to the board (10) in the direction in which the board (10) is conveyed.</p>
申请公布号 WO2011062051(A1) 申请公布日期 2011.05.26
申请号 WO2010JP69413 申请日期 2010.11.01
申请人 ULVAC, INC.;MINAMI, HIROFUMI 发明人 MINAMI, HIROFUMI
分类号 B25J15/00;B25J15/08;H01L21/677 主分类号 B25J15/00
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