SUBSTRATE FOR SUPPORTING BIOACTIVE MATERIALS, FABRICATION METHOD THEREOF, AND BIOCHIP COMPRISING THE SAME

摘要

PURPOSE: A substrate for fixing bioactive materials and a method for manufacturing the same are provided to produce cheap plastic biochips with high reliability. CONSTITUTION: A substrate for fixing bioactive materials comprises: a plastic substrate(10); a silicon thin film(3) of silicon nitride, silicon oxy-nitride, or silicon oxide thin film; a self-assembled thin film(5) having a hydrophilic group. The thickness of the silicon thin film is 1-100nm. The hydrophilic group contains a hydroxyl group, amine group, aldehyde group, carboxyl group, or mixture thereof. A method for manufacturing the substrate comprises: a step of forming the silicon film on the plastic substrate; a step of performing oxygen plasma process to enhance hydroxyl group density on the surface of the silicon thin film; and a step of forming the self-assembled thin film on the silicon thin film.