| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas sensor capable of performing high-accuracy measurement which is high in responsiveness and has strength at which a sensor element can be prevented from being damaged by stress generated in assembling and usage. <P>SOLUTION: The gas sensor 100 includes a sensor element 101 formed of an oxygen-ion conductive solid electrolyte as a main component and detects a specific gas component in a measurement gas, and the sensor element 101 includes an internal space to which the measurement gas is introduced from the outside, a first electrode formed on a surface of the internal space and a second electrode formed in a space different from the internal space, and a pump cell deployed to be operable to pump out oxygen existing in the internal space when a predetermined voltage is applied across the first and second electrodes. The thickness of the internal space is 50 μm or larger and 180 μm or smaller. <P>COPYRIGHT: (C)2011,JPO&INPIT |
