发明名称 ALIGNMENT MARK-MANAGING DEVICE, ALIGNMENT MARK-MANAGING SYSTEM AND PROGRAM
摘要 <P>PROBLEM TO BE SOLVED: To efficiently exchange stages on changing product types of flat display panels and supplying a panel to a manufacturing step. <P>SOLUTION: An alignment mark-managing device 2 is provided, including: a communication unit 21, which is connected through a network to a computer device placed in each step of manufacturing a flat display panel and which transmits and receives data with the computer devices; a management data base 23, which receives an alignment mark extracted by at least one computer device in a plurality of computer devices and stores the alignment mark; and a control unit 22, which allows the computer device disposed in a manufacturing step during which the flat display panel passes, to download the alignment mark read out from the management data base 23 and to store as an alignment mark in a mark storing unit. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011102873(A) 申请公布日期 2011.05.26
申请号 JP20090257431 申请日期 2009.11.10
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 HISA TAKAFUMI;TAMAMOTO JUNICHI;OKADA HIROSHI;OTSUBO YUJI;AKIMOTO HAYATO;MORIYA HIDEKI
分类号 G03F7/20 主分类号 G03F7/20
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