LIGHTING OPTICAL DEVICE, EXPOSURE DEVICE, AND CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To prevent the condensation of light from optical elements in a narrow region on a surface of a following optical member when the light from a plurality of optical elements is used.

SOLUTION: A lighting device 2 for lighting a surface of a reticle by using the light from a light source 7 includes: a plurality of mirror elements 3 which are two-dimensionally arranged on the light path; a drive 4 for driving the plurality of mirror elements 3 and independently controlling each of the light deflection directions; and a relay optical system 14 which introduces the light deflected by the plurality of mirror elements 3 into an incident surface of a fly-eye lens 15. The relay optical system 14 prevents the light in the same direction from being condensed in one point at the incident surface 22I when the light deflection directions in the plurality of mirror elements 3 are aligned to be identical.

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