发明名称 EFFICIENT TELECENTRIC OPTICAL SYSTEM (ETOS)
摘要 A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction.
申请公布号 US2011122404(A1) 申请公布日期 2011.05.26
申请号 US200913003725 申请日期 2009.07.21
申请人 ORBOTECH LTD. 发明人 FISCH DAVID;KATZIR YIGAL
分类号 G01N21/00 主分类号 G01N21/00
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