发明名称 LOW OXYGEN CONTENT SEMICONDUCTOR MATERIAL FOR SURFACE ENHANCED PHOTONIC DEVICES AND ASSOCIATED METHODS
摘要 Radiation-absorbing semiconductor devices and associated methods of making and using are provided. In one aspect, for example, a method for making a radiation-absorbing semiconductor device having enhanced photoresponse can include forming an active region on a surface of a low oxygen content semiconductor, and annealing the low oxygen content semiconductor to a temperature of from about 300° C. to about 1100° C., wherein the forming of the active region and the annealing of the low oxygen content semiconductor are performed in a substantially oxygen-depleted environment.
申请公布号 US2011121424(A1) 申请公布日期 2011.05.26
申请号 US20100771848 申请日期 2010.04.30
申请人 CAREY JAMES;LI XIA;ALIE SUSAN;PRALLE MARTIN U 发明人 CAREY JAMES;LI XIA;ALIE SUSAN;PRALLE MARTIN U.
分类号 H01L31/105;H01L21/22 主分类号 H01L31/105
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