| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable mirror actuator correcting various spherical aberration with small and simplified control in a curvature variable mirror. <P>SOLUTION: The variable mirror actuator includes a reflection member 17 reflecting applied light, a magnetic force imparting member 18 imparting bending force to the reflection member 17 by addition of a magnetic field to the magnetic force imparting member and an electromagnet structure D1 adding the magnetic field to the magnetic force imparting member 18 and bending the reflection member 17 in a desired shape by addition of current to the electromagnet structure. Attraction is given to the magnetic force imparting member 18 by the current applied to the electromagnet structure D1, the reflection member 17 is thereby bent in an ideal parabolic shape, intensity distribution of the applied light is changed and thus spherical aberration can be corrected. <P>COPYRIGHT: (C)2011,JPO&INPIT |
