发明名称 |
CELLULAR ELECTROPHYSIOLOGY SENSOR CHIP AND CELLULAR ELECTROPHYSIOLOGY SENSOR USING THE CHIP, AND METHOD OF MANUFACTURING CELLULAR ELECTROPHYSIOLOGY SENSOR CHIP |
摘要 |
A cellular electrophysiology sensor is adapted to measure an electrical change of a test cell. A chip for the sensor includes a diaphragm, and a thermally-oxidized film mainly containing silicon dioxide on the diaphragm. The diaphragm includes a silicon layer and a silicon dioxide layer on an upper surface of the silicon layer. A through-hole passing through the silicon layer and the silicon dioxide layer is formed. The through-hole has an opening which opens at the silicon dioxide layer and is adapted to capture the test cell. The thermally-oxidized film is provided on an inner wall surface of the through-hole, and unified with the silicon dioxide layer at the opening of the through-hole. This cellular electrophysiology sensor chip can stably capture the test cell and provides a gigaseal stably even if test cells have different properties,
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申请公布号 |
US2011120864(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
US20090677977 |
申请日期 |
2009.07.22 |
申请人 |
TAKAHASHI MAKOTO;NAKATANI MASAYA;USHIO HIROSHI;YAMAMOTO TAKEKI |
发明人 |
TAKAHASHI MAKOTO;NAKATANI MASAYA;USHIO HIROSHI;YAMAMOTO TAKEKI |
分类号 |
G01N33/487;B32B37/00 |
主分类号 |
G01N33/487 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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