发明名称 |
BIPOLAR PULSED POWER SUPPLY AND POWER SUPPLY APPARATUS HAVING PLURALITY OF BIPOLAR PULSED POWER SUPPLIES CONNECTED IN PARALLEL WITH EACH OTHER |
摘要 |
A bipolar pulsed power supply which supplies power in a bipolar pulsed mode at a predetermined frequency to a pair of electrodes that come into contact with a plasma is arranged to reduce the switching loss of the switching elements in a bridge circuit, and also to attain a high durability without using high-performance switching elements. The bipolar pulsed power supply has: a bridge circuit constituted by switching elements SW1 through SW4 connected to positive and negative DC outputs from a DC power supply source; and a control means for controlling switching ON or OFF of each of the switching elements in the bridge circuit. An output-short-circuiting switching element SW0 is disposed between the positive and the negative DC outputs from the DC power supply source such that, in a short-circuited state of the output-short-circuiting switching element, each of the switching elements in the bridge circuit is switched by the control means.
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申请公布号 |
US2011120860(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
US20090989692 |
申请日期 |
2009.05.20 |
申请人 |
HORISHITA YOSHIKUNI;ONO ATSUSHI;OSHIMA WATARU |
发明人 |
HORISHITA YOSHIKUNI;ONO ATSUSHI;OSHIMA WATARU |
分类号 |
C23C14/34;H05H1/48 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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