发明名称 |
METHOD AND DEVICE FOR THE ABSORPTION OF HEAT IN A VACUUM COATING APPARATUS |
摘要 |
An apparatus and method for heat absorption in vacuum coating installations includes an absorber having a line system to supply a coolant. The line system is enclosed by a jacket tight relative to the vacuum chamber, flow spaces are arranged between the line system and the jacket, which are connected to a source of heat exchanger medium so that the line system is flowed around by a heat exchanger medium sealed relative to the vacuum chamber.
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申请公布号 |
US2011120682(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
US20100954053 |
申请日期 |
2010.11.24 |
申请人 |
VON ARDENNE ANLAGENTECHNIK GMBH |
发明人 |
VON DER WAYDBRINK HUBERTUS;BARTHEL KNUT;HENTSCHEL MICHAEL;LESSMAN STEFFEN;KENNE MARCO;MUCHAMEDJAROW DAMIR;JAEGER REINHARD |
分类号 |
F28D7/10 |
主分类号 |
F28D7/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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