THIN-FILM PHOTOELECTRIC CONVERSION DEVICE, AND PROCESS FOR PRODUCTION OF THIN-FILM PHOTOELECTRIC CONVERSION DEVICE

摘要

Disclosed are: a thin-film photoelectric conversion device, in which the detachment between layers that constitute the thin-film photoelectric conversion device can be suppressed and no offcut remains in separation grooves; and a process for producing the device. The thin-film photoelectric conversion device comprises a substrate having a transparent electrode layer attached thereto and at least one photoelectric conversion unit and a rear electrode layer both formed on the substrate, wherein the substrate comprises a light-permeable base body and a light-permeable under layer and a transparent electrode layer both laminated in this order on one main surface of the base body. The transparent electrode layer, the photoelectric conversion unit and the rear electrode layer are separated from one another by multiple separation grooves so as to form multiple photoelectric conversion cells, and the multiple photoelectric conversion cells are electrically connected to each other through multiple connection grooves. It is preferred that the content ratio of magnesium oxide in the light-permeable base body be 0.2 to 2.0 wt%. It is also preferred that the light-permeable base layer comprise light-permeable insulating microparticles and a light-permeable binder and the transparent electrode layer comprise zinc oxide that is deposited by a low-pressure CVD method.