METHOD AND DEVICE FOR ABLATION OF THIN-FILMS FROM A SUBSTRATE

摘要

The invention relates to a method for ablating material (3, 4, 5) from a substrate (2) with a laser, comprising a directing means adapted for guiding a laser spot of the laser relative to a substrate (2) surface in two distinguished directions, the method comprising the steps of: a) Moving (13) the substrate (2) relative to the laser spot, and b) Moving the laser spot on the substrate (2) surface in a closed loop pattern (12) by impinging the directing means with a sine-type harmonic oscillation in each of the two distinguished directions.