METHOD FOR MANUFACTURING A PALLADIUM ALLOY HYDROGEN SEPARATION LAYER

摘要

The present invention relates to a method for manufacturing a palladium alloy hydrogen separation layer, the method comprising the steps of: finely grinding a porous base; surface-treating the finely ground porous base with plasma; forming a palladium layer and a metal layer on the porous base using a high-temperature sputtering process; and reflow heat treating the palladium layer and the metal layer to form a palladium alloy separation layer.