| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain: a method for manufacturing a piezoelectric membrane whose crystal states such as crystal grain size and orientation are stable; a method for manufacturing a piezoelectric element whose displacement is secured, and to provide a liquid jet head. <P>SOLUTION: When a shelf time T after a degreasing step (S4) is set to be within six hours at a normal temperature and humidity, influences of water or the like on a piezoelectric membrane precursor laminate 72 are prevented in an atmosphere and the crystal states such as the crystal grain size and orientation of the burned piezoelectric membrane 73 are stable, thereby obtaining the method for manufacturing the piezoelectric membrane 73 whose piezoelectric performance is stable. <P>COPYRIGHT: (C)2011,JPO&INPIT |
