PAD FOR FOMING A CAVITY AND METHOD OF MANUFACTURING USING THE SAME

摘要

PURPOSE: A pad for forming a cavity and a method for precisely forming the cavity without an error using the same are provided to prevent the movement of a substrate remaining unit by uniformly giving the absorption force of an absorption unit to the substrate. CONSTITUTION: A first porous cover layer(110) receives the absorption force from an absorption device. A porous dispersion layer(120) is formed on the first porous cover layer. The porous dispersion layer disperses the absorption force. A second porous cover layer(130) is formed on the dispersion layer and supports the substrate. The cavity of the first cover layer is identical to the cavity of the second cover layer.