| 摘要 |
<p>PURPOSE: A substrate conveyor apparatus is provided to stably convey substrates with various sizes and to easily arrange additional equipment on the bottom of the substrate conveyor apparatus. CONSTITUTION: A substrate conveyor apparatus comprises multiple rollers and side rollers(210,220). The rollers are in contact with the bottom surface of a substrate to convey the substrate in a designed direction. The side rollers are in contact with the side surfaces of the substrate to prevent the substrate from being separated from the designed direction. The substrate comprises a first substrate and a second substrate which has a size different from the first substrate. The side rollers comprise multiple first side rollers, corresponding to the first substrate, and second side rollers, corresponding to the second substrate.</p> |
