发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a technology for reducing the rewriting current of a phase change memory. <P>SOLUTION: A resistive element R of a phase change memory has a laminated structure comprising a lower electrode 121, a piezoelectric material layer 122, a barrier layer 123, a memory layer 124, and upper electrode 125. The maximum temperature reached (phase change temperature from a phase to an &alpha; phase) of the phase change material is lowered to reduce the rewriting current by utilizing an electrostrictive effect of the piezoelectric material layer 122 to apply the compressive stress to the phase change material (the memory layer 124) during the operation of a memory cell MC. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011103323(A) 申请公布日期 2011.05.26
申请号 JP20090256978 申请日期 2009.11.10
申请人 HITACHI LTD 发明人 KUROTSUCHI KENZO;TAKAURA NORIKATSU;SASAKO YOSHITAKA;MORIKAWA TAKAHIRO
分类号 H01L27/105;H01L27/10;H01L41/09;H01L41/18;H01L41/22;H01L41/311;H01L41/39;H01L45/00 主分类号 H01L27/105
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