发明名称 |
MICROMACHINED TRANSDUCERS AND METHOD OF FABRICATION |
摘要 |
In accordance with an illustrative embodiment, a method of fabricating a transducer is described. The method comprises providing a transducer over a first surface of a substrate, wherein the substrate comprises a thickness. The method further comprises patterning a mask over a second surface. The mask comprises an opening for forming a scribe etch. The method comprises etching through the opening in the mask and into but not through the thickness of the substrate to provide the scribe etch.
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申请公布号 |
US2011120971(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
US20090623768 |
申请日期 |
2009.11.23 |
申请人 |
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD. |
发明人 |
MARTIN DAVID;PHILLIBER JOEL |
分类号 |
C23F1/02;C23C14/46 |
主分类号 |
C23F1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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