发明名称 WORKPIECE CUTTING METHOD
摘要 A cutting method for cutting a workpiece by using a cutting blade. The cutting method includes the steps of attaching an adhesive sheet to one surface of the workpiece, holding the workpiece through the adhesive sheet on holding means, and feeding the cutting blade into the workpiece until reaching the adhesive sheet as supplying a cutting fluid having a temperature of 10° C. or less, thereby cutting the workpiece.
申请公布号 US2011124181(A1) 申请公布日期 2011.05.26
申请号 US20100948268 申请日期 2010.11.17
申请人 DISCO CORPORATION 发明人 SUZUKI TAMAKI;MORI TATSUHIKO
分类号 H01L21/78 主分类号 H01L21/78
代理机构 代理人
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