发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME |
摘要 |
<p>Disclosed is a semiconductor device which is provided with an interlayer insulating film (16) that includes a plurality of holes. The interlayer insulating film (16) is a film having a single layer structure. In the interlayer insulating film (16), the diameters of the holes included in a lower surface region and the diameters of the holes included in an upper surface region are smaller than the diameters of the holes included in the center region between the upper region and the lower region.</p> |
申请公布号 |
WO2011061879(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
WO2010JP05120 |
申请日期 |
2010.08.19 |
申请人 |
PANASONIC CORPORATION;SEO, TOSHIKI |
发明人 |
SEO, TOSHIKI |
分类号 |
H01L21/316;H01L21/768;H01L23/522 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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