发明名称 |
METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT |
摘要 |
Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA-chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in one or more steps in a VIA environment.
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申请公布号 |
US2011120373(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
US20100842967 |
申请日期 |
2010.07.23 |
申请人 |
BOLLMAN BRENT;LEIDHOLM CRAIG;STANLEY NATHANIAL;RAIL MATTHEW |
发明人 |
BOLLMAN BRENT;LEIDHOLM CRAIG;STANLEY NATHANIAL;RAIL MATTHEW |
分类号 |
H01L31/18 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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