| 摘要 |
PROBLEM TO BE SOLVED: To provide an EELS using an energy filter, which can improve a dynamic range at the time of acquiring an EELS spectral signal. SOLUTION: In the electron energy loss spectroscopy device using an energy filter which includes a means for fixing an electron beam in a range where a sample exists and emits the beam, an energy filter 8 for energy-dispersing the electron beam emitted from the region in a prescribed direction to form a spectrum, and a photographing means 10 for photographing the spectrum, the device further includes: a deflection means for deflecting the spectrum; and a signal generating unit 30 for supplying, to the deflecting means, a deflecting signal for deflecting the spectrum in a perpendicular direction to an energy-dispersing direction, so that the spectrum may be photographed by the photographing means 10 while it is deflected in a direction perpendicular to the energy-dispersing direction. COPYRIGHT: (C)2011,JPO&INPIT |
