| 摘要 |
PURPOSE: A high-precision ceramic substrate preparation process is provided to prevent a failure by coating antioxidants bonding layer on the surface of a conductive layer to suppress the oxidation of a conductive layer. CONSTITUTION: In a high-precision ceramic substrate preparation process, a soft blank is sintered by a ceramic plate(1) having at least a through-hole(11). The metal layer(12) is coated on the surface of the ceramic plate. A dry film(2) is bonded in the surface of the metal layer. The dry film is processed by exposure and development process. The conductive layer is coating on the metal layer and an oxygen-resistant bonding layer is coated on the surface of the conductive layer.
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