Microelectromechanical sensing device

摘要

The present invention is aimed at an analog output microelectromechanical (MEMS) sensing device internally comprising a transducer in which first and second senstivie reading elements of a physical magnitude with different absolute value of their respective sensitivity are located in different sites. This allows reducing energy consumption when it is used with circuits which make use of the signal provided by said sensor, the reduction of manufacturing costs and the combination between integrated circuit manufacturing techniques, such as CMOS (Complementary Metal Oxide Semiconductor) and MEMS (Micro-Electro-Mechanical Systems) for example. The multiple signal output may facilitate digitalization of the measurement and give rise to a device requiring a smaller area given that the associated circuits are simplified. The same device may have other technical advantages by means of uses suited for the circuits to which it is connected.