| 摘要 |
<p>PURPOSE: A template processing method, program, computer recording medium, template processing device, and imprint system are provided to apply alcohol on a release agent of a template, thereby increasing the adhesive power between the surface of the template and the release agent. CONSTITUTION: A template is inserted into a transition unit of a processing station(A1). The surface of the template is cleaned(A2). A release agent is applied on the entire surface of the template(A3). A release agent on the template is dried by the rotation of the template(A4). Alcohol is applied on the release agent on the template(A5). Alcohol is eliminated from the template by the rotation of the template(A6). The template is carried to a template cassette by a template returning object(A7).</p> |
