| 摘要 |
<p>PURPOSE: A pellicle is provided to reduce the generation amount of out gas and improve the absorbing property with respect to organic gas. CONSTITUTION: A pellicle includes a pellicle frame, a pellicle layer, and an adhesive. The pellicle layer is arranged at one side of the pellicle frame. The adhesive is arranged on another side of the pellicle frame. The weight swelling degree of the adhesive is increased by toluene. The adhesive includes resultant of (meth)acrylic acid alkylester copolymer and a hardening agent. The (meth)acrylic acid alkylester copolymer is the copolymer of C4 to C14 (meth)acrylic acid alkyl ester and a functional group reactive with the hardening agent. The hardening agent is one selected from a group including a multifunctional epoxy compound and isocyanate-based compound.</p> |
