发明名称 |
OXIDE SINTER, TARGET, TRANSPARENT CONDUCTIVE FILM OBTAINED FROM THE SAME, AND TRANSPARENT CONDUCTIVE BASE |
摘要 |
<p>Provided are an oxide sintered body having zinc oxide as a main component and still more containing magnesium, a target obtained by processing the same, a transparent conductive film having excellent chemical resistance and low resistance, obtained by a direct-current sputtering method or an ion plating method by using the same, and a transparent conductive substrate. Provided are an oxide sintered body having zinc oxide and magnesium, wherein the content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Mg); still more, an oxide sintered body having zinc oxide, magnesium, gallium and/or aluminum, wherein the content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+A1)/(Zn+Ga+Al), and the content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+ Ga+Al+Mg); a target obtained by processing these oxide sintered bodies; and a transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using this target.</p> |
申请公布号 |
EP2025654(A4) |
申请公布日期 |
2011.05.25 |
申请号 |
EP20070743209 |
申请日期 |
2007.05.11 |
申请人 |
SUMITOMO METAL MINING CO., LTD. |
发明人 |
NAKAYAMA, TOKUYUKI;ABE, YOSHIYUKI |
分类号 |
C04B35/453;C04B35/626;C23C14/34;H01B1/08;H01B5/14;H01L31/18 |
主分类号 |
C04B35/453 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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