| 摘要 |
PURPOSE: An array testing apparatus is provided to reduce a time for inspecting a large size substrate by preventing an electrode and a liquid crystal unit from being deflected to improve inspection accuracy. CONSTITUTION: An array testing apparatus(1) comprises an absorbing apparatus(4), a modulator(3), a detection unit(2), and a supporting member(31). The modulator comprises an electrode unit(32) and a liquid crystal unit(33). The supporting member supports the electrode unit. A light source(5) is arranged on the substrate which is absorbed by the absorbing apparatus. |
