APPARATUS FOR REMOVING IMPURITIES HAVING LAYER STRUCTURE CAPABLE OF SIMULTANEOUS CLEANING ON THE TOP SIDE AND BOTTOM SIDE OF THE FILM,申请号KR20090060043-传众专利搜索

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发明名称	APPARATUS FOR REMOVING IMPURITIES HAVING LAYER STRUCTURE CAPABLE OF SIMULTANEOUS CLEANING ON THE TOP SIDE AND BOTTOM SIDE OF THE FILM
摘要
申请公布号	KR101036830(B1)	申请公布日期	2011.05.25
申请号	KR20090060043	申请日期	2009.07.02
申请人		发明人
分类号	B08B7/04;B08B3/08;B08B3/10;B08B6/00	主分类号	B08B7/04
代理机构		代理人
主权项
地址

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