Ion analysis system based on analyzer of ion energy distribution using retarded electric field
摘要
<p>An ion analysis system to measure ion energy distribution at several points during a process of manufacturing a semiconductor circuit includes at least two ion flux sensors (397) combined in a single system to measure an ion energy distribution function, each of the ion flux sensors (397) having cells including an opening (222) of 50 micrometers or less.</p>
申请公布号
EP1884984(B1)
申请公布日期
2011.05.25
申请号
EP20070109872
申请日期
2007.06.08
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, YUNG HEE;USHAKOV, ANDREY;TOLMACHEV, YURI;VOLYNETS, VLADIMIR;PAK, WON CEAK;PASHKOVSKIY, VASILY