| 摘要 |
<p>PURPOSE: A lithography pellicle is provided to efficiently and uniformly form an adhesive layer at the inner circumference surface of an atmospheric pressure controlling hole. CONSTITUTION: An inner circumference surface is arranged at an atmospheric pressure controlling hole. The inner circumference surface is opened toward to the inner side of a pellicle frame(3). An adhesive layer is arranged at the inner circumference through a spraying operation. A filter(7) is formed at the outer lateral surface of the pellicle frame in order to cover the atmospheric pressure controlling hole.</p> |
