| 摘要 |
PURPOSE: A remaining gas removal apparatus using inert gas is provided to remove the necessity of installing additional ventilation systems by removing remaining gas right before disassembling an exhausting pipe. CONSTITUTION: A remaining gas removal apparatus using inert gas includes a process chamber(1), a vacuum pump(3), an exhausting pipe, and a ventilation pipe(51). The process chamber receives gas. The vacuum pump is connected to the process chamber using a connection pipe(2). The exhausting pipe interconnects the vacuum pump and a scrubber(5), and includes an inert gas inflowing valve(41). The inert gas inflowing valve inflows the inert gas to the same direction with the movement of waste gas.
|
