Method and device for polarising a DBD electrode

摘要

The device has a direct current source (DC) intercalated in a secondary circuit of a very high voltage transformer such that chemical species in the form of electrically positive or negative ions produced in the plasma are attracted selectively by a target substrate and repelled by the corresponding load electrodes. The source is inserted in series and parallel with a rotor of the transformer. An independent claim is also included for a method for depositing layers on inorganic substrate.