| 摘要 |
PURPOSE: A leak detection system is provided to test leak with excellent efficiency when multiple test bodies are consecutively tested. CONSTITUTION: A leak detection system comprises a test chamber(1), a sealing unit(2), a transport unit(3), a transfer unit(4), a covering unit(42a), and a leak detection unit(5). The test chamber is connected to a vacuum pump(P1). The sealing unit seals helium gas in test bodies. The transport unit transports the test bodies to an interval between a detection preparation position and a sealing control position. The transfer unit transfers the test bodies from the detection preparation position to a detection position. The covering unit covers the test chamber when the test bodies are at the detection position. The leak detection unit detects helium leaking from the test bodies. |
