发明名称 |
OPTICAL ELEMENT FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS COMPRISING SUCH OPTICAL ELEMENT AND METHOD FOR MAKING THE OPTICAL ELEMENT |
摘要 |
<p>A lithographic apparatus includes an optical element that includes an oriented carbon nanotube sheet. The optical element has an element thickness in the range of about 20-500 nm and has a transmission for EUV radiation having a wavelength in the range of about 1-20 nm of at least about 20% under perpendicular irradiation with the EUV radiation.</p> |
申请公布号 |
KR20110055601(A) |
申请公布日期 |
2011.05.25 |
申请号 |
KR20117005261 |
申请日期 |
2009.07.22 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
SJMAENOK LEONID;BANINE VADIM;MOORS ROEL;GLUSHKOV DENIS;YAKUNIN ANDREI MIKHAILOVICH |
分类号 |
H01L21/027;G03F7/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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