Mesoporous thin film and method of producing the same

摘要

An electroconductive porous film high in the porosity and strong in the mechanical strength is provided. A mesoporous thin film of the invention, in which a crosslinking structure having a metal phosphate (M—POx) skeleton is arranged so as to surround periodically arranged pores, is formed by use of a process that includes: a step of preparing a precursor solution containing phosphoric acid and a surfactant; a step of supplying the precursor solution to a substrate to form a precursor thin film; a step of bringing vapor containing a metal into contact with the precursor thin film obtained in the forming the thin film; a step of reacting the vapor containing a metal and phosphoric acid to form a self-organized thin film; and a step of removing the surfactant from the self-organized thin film.